vacuum technology for the semiconductor industry

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crystal growing furnace wafer chuck vacuum components photovoltaic industry

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Semiconductor manufacturing requires vacuum processes such as deposition, etch, ion implant, lithography, metrology or wafer handling.
Vacuum systems are used at various stages of manufacturing to reduce impurities and prevent contamination, lowering the pressure to facilitate the uniformity of wafer placement, reducing the temperature to prevent wafer deformation

 

 

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